Rubber seals in the semiconductor field are designed with special materials and properties to support the industry’s stringent requirements for purity, durability, and precision.

1. Vacuum Sealing and Contamination Control
In semiconductor manufacturing equipment, such as in deposition and etching systems, which require high vacuum levels to prevent impurities from affecting the delicate semiconductor layers.

2.Chemical Resistance and Cleanliness
Rubber seals with chemical resistance prevent degradation and minimize contamination, ensuring that no particles or residues affect the semiconductor wafers.

3. Thermal Stability in High-Temperature Environments
Semiconductor manufacturing involves high-temperature steps, such as oxidation, diffusion, and annealing, requiring seals that can withstand these temperatures without degrading.

4. Precision in Automated Equipment
Rubber seals ensure smooth operation by preventing leakage of gases and fluids, stabilizing movement, and reducing vibrations. Their flexibility allows precise positioning and alignment.

5. Use in Cleanroom Environments
In semiconductor fabrication, rubber seals are essential for isolating cleanrooms and clean tools from external contaminants.                            

                                                                                       The type of Material Used:                                                            

1. Fluoroelastomers (FKM, Viton®)
Properties: Fluoroelastomers are widely used in the semiconductor industry due to their excellent resistance to a broad range of chemicals (acids, solvents, oils) and high temperatures (up to 250°C or higher). They are also resistant to outgassing and ozone.                                                    
Applications: Seals, gaskets, O-rings, and tubing used in semiconductor fabrication equipment, especially for high-temperature and chemical-resistant environments.

Temperature Range: -20°C to 250°C (-4°F to 482°F).

2. Silicone Rubber (VMQ)
Properties: Silicone rubber offers excellent high-temperature resistance (up to 200°C or more),  excellent electrical insulation and resistance to aging, ozone, and weathering.
Applications: Seals, gaskets, insulating components, and vibration dampers in cleanroom environments and semiconductor equipment.

Temperature Range: Typically -50°C to 250°C (-58°F to 482°F).

3. Ethylene Propylene Diene Monomer (EPDM)
Properties: EPDM rubber is resistant to heat, ozone, weathering, and steam, making it ideal for semiconductor cleanroom environments. It has good electrical insulation properties and is resistant to many acids and alkalis.
Applications: Seals and gaskets in semiconductor processing equipment that requires resistance to environmental factors like ozone, water, and steam.

Temperature Range: -50°C to 150°C (-58°F to 302°F).

4. Perfluoroelastomers (FFKM)
Properties: Perfluoroelastomers, such as Kalrez® and Chemraz®, offer the highest chemical resistance of any rubber material. They are highly resistant to aggressive chemicals and extreme temperatures (up to 320°C) and are often used in highly demanding semiconductor environments.
Applications: Seals, gaskets, O-rings, and critical components used in semiconductor fabrication, etching, and chemical vapor deposition (CVD) equipment, where exposure to harsh chemicals is common.                                                                                

Temperature Range: -20°C to 325°C (-4°F to 617°F).

5. Fluorosilicones (FVMQ)
Properties: Fluorosilicone rubber combines the high-temperature stability of silicone with the chemical resistance of fluoroelastomers. It is particularly useful in environments that involve both high temperatures and chemical exposure.
Applications: Gaskets, seals, and O-rings in semiconductor processing systems where both heat and chemical exposure are a concern.

Temperature Range: -55°C to 200°C (-67°F to 392°F).